Gusobanukirwa Ikoranabuhanga Rito
Tekinoroji yoroheje ikubiyemo gushira ibice byuruhu rwibintu (mubisanzwe kuva kuri nanometero nkeya kugeza kuri micrometero nkeya) kuri substrate. Izi nzego zirashobora gukorwa mubyuma, semiconductor, insulator, cyangwa ibindi bikoresho, kandi bikoreshwa mugukora ibikoresho bya elegitoroniki bikora. Iri koranabuhanga ni ingenzi cyane mugukora ibikoresho bya elegitoroniki kuko bifasha neza kandi neza imikorere yibigize. Ububiko bwa firime ntoya busanzwe bukorwa binyuze mumyuka yumubiri (PVD) cyangwa imyuka ya chimique (CVD), byemeza ubuziranenge nigikorwa cyibicuruzwa byanyuma.
Iterambere rya tekinoroji yoroheje ryatangiye mu kinyejana cya 20 rwagati igihe iterambere ryagaragaye mu bumenyi bw’ibikoresho no mu buhanga bwo kubika vacuum. Ku ikubitiro, tekinoroji ya firime yoroheje yakoreshwaga cyane cyane munganda ziciriritse kugirango zikore transistor hamwe nizunguruka. Mugihe ikoranabuhanga ryateye imbere nibisabwa byiyongereye, ikoreshwa rya tekinoroji yoroheje ya firime yagutse vuba. Muri iki gihe, irakoreshwa cyane mu gukora sensor, gutwika optique, ingirabuzimafatizo z'izuba, disiki zikomeye, hamwe no kurwanya ruswa, n'ibindi. Kurugero, mubikorwa bya sensor, tekinoroji yoroheje ikoreshwa mugukora ibyuma byerekana ingufu, ibyuma bya gaze, hamwe nubushyuhe bwubushyuhe, burangwa no kumva neza no kumenya neza. Byongeye kandi, ikoreshwa rya tekinoroji yoroheje muri sisitemu ya microelectromechanical sisitemu (MEMS) na nanotehnologiya nayo iragenda yiyongera, itanga inkunga ikomeye yo guhanga udushya no kwiteza imbere muriki gice.
Ibyingenzi byingenzi bya tekinoroji yoroheje ikubiyemo ubuhanga bwayo buhanitse, bworoshye, hamwe nubushobozi bwimikorere myinshi. Ubusobanuro buhanitse butuma tekinoroji yoroheje igera ku bipimo nyabyo mu ntera ntoya, ibyo bikaba ari ingenzi cyane ku bikoresho nka sensor sensor ikenera kugumana ibipimo nyabyo byumuvuduko mubihe bidukikije. Ihinduka rya firime yoroheje ibemerera guhuza nuburyo butandukanye hamwe nibisabwa bikenewe, bigafasha gushira kumasoko atandukanye nka silikoni, ikirahure, ibyuma, na plastiki, bityo bakagera kubikorwa byinshi. Byongeye kandi, tekinoroji yoroheje irashobora guhuzwa nubundi buryo bwibikoresho nibikoresho byo gukora ibikoresho hamwe nibikorwa byinshi. Kurugero, guhuza tekinoroji yoroheje ya firime na MEMS birashobora kubyara ibyuma bito bito bito bito kandi byoroshye ariko nanone byoroshye kandi byizewe.
Tekinoroji ya firime irashobora kandi guhuza ibikorwa byinshi mugikoresho kimwe, bivuze ko kumva, gupima, no gutunganya amakuru bishobora kugerwaho icyarimwe murwego ruto rwa firime, byoroshya igishushanyo mbonera nogukora ibikoresho. Ubu bushobozi bwo kwishyira hamwe ntabwo bwongera imikorere yibikoresho no kwizerwa gusa ahubwo binagabanya ibiciro byo gukora no kugorana. Mugutezimbere ibyuma byumuvuduko, tekinoroji ya firime irashobora kunoza cyane imikorere ya sensor, ibemerera gukora neza mubidukikije bigoye.
Kwishyira hamwe kwa Tekinike-ya Tekinoroji mu byerekezo byumuvuduko
Kwinjiza tekinoroji yoroheje ya firime mubyuma byerekana imbaraga bigamije kuzamura imikorere, kugabanya ingano, no kongera ibyiyumvo. Mugucunga neza ibintu bifatika hamwe nubunini bwurwego, tekinoroji ya firime yoroheje ituma iterambere ryibisobanuro bihanitse bishoboka. Uku kwishyira hamwe ntabwo kunoza imikorere rusange ya sensor gusa ahubwo bizana inyungu zingenzi mubice byinshi byingenzi.
Ubwa mbere, tekinoroji ya firime yoroheje ituma miniaturizasi ya sensor. Ibyuma byumuvuduko gakondo bikunze guhura nubunini nuburemere, mugihe tekinoroji ya firime yoroheje ituma hakorwa ibyuma bito, byoroheje bitabangamiye imikorere. Ibi nibyingenzi byingenzi kubisabwa bifite umwanya muto cyangwa bisaba ibisubizo byoroheje, nkibikoresho byubuvuzi na MEMS.
Icya kabiri, ibyuma byoroheje byerekana neza cyane mu kongera ibyiyumvo. Tekinoroji ya firime irashobora kumenya impinduka zumunota hamwe nibisobanuro bihanitse, bigatuma ibyo byuma byunguka mubidukikije bisaba ibipimo nyabyo. Kurugero, muburyo bwo gutangiza inganda no gukurikirana ibidukikije, ibyuma byerekana ingufu za firime birashobora gutanga amakuru yukuri, bityo bikazamura imikorere muri sisitemu no kwizerwa.
Byongeye kandi, tekinoroji ya firime itezimbere kwizerwa no kuramba byumuvuduko. Uburinganire buhanitse kandi butajegajega bwa firime yoroheje yerekana imikorere ihamye yo gukoresha igihe kirekire. Ugereranije na sensor gakondo, ibyuma byoroheje birashobora gukomeza gukora neza no mubihe bidukikije bikabije, bigatuma bikoreshwa cyane mubice nkindege n’inganda zitwara ibinyabiziga.
Ugereranije nuburyo gakondo, tekinoroji-yoroheje itanga ubundi buryo bworoshye, bworoshye, kandi bworoshye cyane. Ibyuma byumuvuduko gakondo bikunze guhura nibibazo mubunini, uburemere, nibisobanutse, mugihe tekinoroji yoroheje ya firime, hamwe nibikoresho byayo byiza hamwe nibikorwa byo gukora, irenga izo mbogamizi. Ibyuma bifata ibyuma bya firime ntabwo bifite ibyiza gusa mubunini n'uburemere ahubwo binarusha cyane sensor gakondo mubijyanye na precision na sensitivite. Izi nyungu zituma tekinoroji yoroheje ikora igice cyingenzi cyiterambere rya tekinoroji igezweho.
Ibikoresho bya Thin-Firime Yumuvuduko
Guhitamo ibikoresho bya sensororo ya firime yoroheje ningirakamaro kuko ibyo bikoresho bigira ingaruka kumikorere no kwizerwa bya sensor.
Ibikoresho bisanzwe
Ibikoresho bisanzwe bikoreshwa mubyuma bifata ibyuma byoroheje birimo ibyuma nka zahabu, platine, na aluminium, bizwiho kuba byiza cyane no kurwanya ruswa. Zahabu, nkibikoresho byayobora cyane, ikoreshwa kenshi muri electrode ibice bya sensor kugirango tumenye neza kandi bihamye byo kohereza ibimenyetso. Platinum, bitewe nubushyuhe buhebuje bwumuriro hamwe no kurwanya okiside, ikoreshwa cyane muri sensororo yubushyuhe bwo hejuru. Aluminium, kuba yoroheje kandi ifite ubushobozi bwiza, ikoreshwa mubikoresho bya sensor bisaba kugenzura ibiro. Byongeye kandi, ibikoresho bya semiconductor nka silicon na germanium bikoreshwa cyane mu byuma byerekana ibyuma byoroheje bitewe n’imiterere y’imashini ndetse no kubyumva neza, bigira uruhare rukomeye muri MEMS.
Ibikoresho bigezweho
Hamwe niterambere ryikoranabuhanga, ibikoresho bigezweho nka nanocomposite na graphene bigenda byitabwaho kubishyira mubikorwa bya sensororo ya firime. Ibi bikoresho byakorewe ubushakashatsi cyane kubintu byiza cyane hamwe nubushobozi bwo kurushaho kunoza imikorere ya sensor. Nanocomposite ihuza ibyiza byibikoresho bitandukanye, itanga imbaraga zumukanishi nubushobozi bwo hejuru, bishobora kuzamura cyane sensor sensibilité no kuramba. Graphene, hamwe nuburyo bumwe bwa atom igizwe nuburyo bukomeye bwamashanyarazi, bifatwa nkuguhitamo kwiza kubikoresho bya sensor bizaza. Ntabwo ifite imbaraga zidasanzwe gusa ahubwo inagaragaza imbaraga zidasanzwe za mashini na elastique, byerekana imbaraga zikomeye mugutezimbere ibyuma byumuvuduko ukabije.
Ibikoresho
Guhitamo ibikoresho bya sensororo ya firime yoroheje bishingiye kumashanyarazi, ubukanishi, nubushyuhe kugirango habeho gukora neza mubikorwa bitandukanye. Kurugero, sensor zikoreshwa mubushyuhe bwo hejuru busaba ibikoresho bifite ubushyuhe buhebuje bwumuriro hamwe na okiside irwanya okiside, mugihe porogaramu zisaba sensibilité nyinshi zitekereza amashanyarazi hamwe na moderi ya elastique modulus yibikoresho. Mugusuzumana ubwitonzi ibyo bintu bifatika, abashushanya barashobora guhitamo ibikoresho bibereye kubikenerwa byihariye bikenewe, bakemeza ko byizewe kandi byukuri bya sensor mubidukikije bigoye.
Gushushanya Ibitekerezo Byoroheje-Filime Yumuvuduko
Igishushanyo mbonera cyibikoresho byerekana imbaraga za firime bigamije kwemeza imikorere yabo, kwizerwa, no gutuza mubikorwa bitandukanye.
Igishushanyo mbonera
Igishushanyo mbonera cyerekana ibyuma byerekana ingufu za firime bigomba kwemeza ko imashini ihagaze neza kandi igakomeza imbaraga mu gihe ikomeza kumva neza. Ibi birasaba abashushanya gutekereza gusa kumiterere yumubiri wa firime yoroheje ariko nanone bakareba imitwaro ya mashini hamwe nigitutu cyibidukikije mubikorwa nyabyo. Igishushanyo mbonera cya sensor kigomba kwihanganira imihangayiko itandukanye hamwe nimpinduka zibidukikije mugihe hagumye ibimenyetso bisohoka bihamye.
Ibyiyumvo
Sensitivite ni ikintu cyingenzi mugushushanya ibyuma byerekana imbaraga, biterwa no guhitamo ibikoresho, ubunini bwa firime yoroheje, hamwe nikoranabuhanga ryo gukora. Ibyiyumvo byunvikana birashobora kumenya umunota wimpinduka, byingenzi mugupima neza no kugenzura porogaramu. Guhitamo ibikoresho bigira ingaruka kuburyo butaziguye; ibikoresho bitandukanye bifite imiterere yubukanishi n amashanyarazi, bikwiranye nibisabwa bitandukanye. Ubunini bwa firime yoroheje nayo ni ikintu gikomeye; firime yoroheje, niko ibyiyumvo byiyongera, ariko ibi birashobora kugabanya imbaraga zumukanishi, bisaba kuringaniza hagati yimyumvire nimbaraga.
Ukuri nukuri
Kugera ku busobanuro buhanitse kandi busobanutse neza mu byuma bifata ibyuma byerekana imbaraga bisaba gushushanya neza no gukora ibintu kugirango harebwe ibipimo byizewe kandi bisubirwemo. Ibi birimo kugenzura neza ubunini nuburinganire bwa firime yoroheje, guhitamo insimburangingo ikwiye, no guhitamo uburyo bwo gukora. Gutandukana kwose mubikorwa byo gukora birashobora kugira ingaruka kumikorere ya sensor, bigatuma kugenzura neza no kugerageza bikenewe.
Ibiranga imikorere Igihe cyo gusubiza
Ibyuma byerekana ingufu za firime mubisanzwe bifite igihe cyihuse cyo gusubiza, ingenzi kubikorwa bigenda bisaba kugenzura igihe nyacyo. Igihe cyihuse cyo gusubiza cyemeza ko sensor ishobora guhita ifata impinduka zumuvuduko, igatanga amakuru yigihe-nyacyo kubisabwa mubikorwa nko gutangiza inganda, ibikoresho byubuvuzi, hamwe nindege.
Kuramba
Guhitamo ibikoresho bikwiye no gukoresha uburyo bwizewe bwo gukora byongera igihe kirekire cyumuvuduko ukabije wamafirime, byemeza igihe kirekire. Kuramba ni ingenzi cyane kubikorwa byigihe kirekire byimikorere ya sensor, cyane cyane abakora mubihe bibi by ibidukikije, nkubushyuhe bwinshi, ubushuhe bwinshi, cyangwa ibidukikije byangirika.
Ihungabana ry’ibidukikije
Ibyuma byerekana ingufu za firime bigomba gukomeza gukora neza mubihe bitandukanye by’ibidukikije, harimo ihindagurika ry’ubushyuhe, ubushuhe, hamwe n’imihangayiko. Ibi bisaba ibyuma bifata ibyuma bifata neza ibidukikije, bigashobora gukora mubushuhe bwagutse, kandi ntibumve impinduka zubushuhe hamwe nihungabana ryimashini. Guhitamo ibikoresho no gupakira bigira uruhare runini mukurinda ibidukikije bya sensor.
Porogaramu ya Thin-Filime Yumuvuduko Sensors
Mu nganda zitwara ibinyabiziga, ibyuma byerekana ibyuma byoroheje bikoreshwa muri sisitemu yo kugenzura amapine (TPMS) kugirango itange amakuru yigihe cyumuvuduko wamapine, byongera umutekano nibikorwa. Muri sisitemu yo gucunga moteri, ibyo byuma bikurikirana bikurikirana lisansi numuyaga, byemeza imikorere ya moteri neza kandi neza. Byongeye kandi, sisitemu yumutekano wimodoka nkimifuka yindege hamwe na sisitemu yo gufata feri yishingikiriza ibyuma byerekana ingufu za firime kugirango bipime neza kandi bikore neza.
Mu rwego rwubuvuzi, ibyuma byerekana umuvuduko ukabije wa firime bikoreshwa mugukurikirana umuvuduko wamaraso, bitanga ibipimo nyabyo kandi bidatera imbaraga mukuvura abarwayi no gusuzuma. Zikoreshwa kandi mu byuma bifata ibyuma byifashishwa mu gukurikirana umubiri udahoraho, kunoza ibisubizo by’ubuvuzi bw’abarwayi. Ibikoresho byubuvuzi byambara, nkabakurikirana imyitozo ngororamubiri hamwe nubugenzuzi bwubuzima, koresha ibyo byuma bikurikirana ibimenyetso byingenzi nibikorwa byumubiri.
Mu rwego rwo mu kirere, ibyuma bifata ibyuma byoroheje bikoreshwa mu kugenzura umuvuduko wa kabine, bigatuma igitutu cyiza cya kabine cyorohereza abagenzi n'umutekano. Zikoreshwa kandi mugukurikirana ubuzima bwubatswe, zishobora kumenya ibibazo bishobora kuba mbere yuko bikomera. Byongeye kandi, ibyo byuma bifata amajwi ni ingenzi muri sisitemu yo kugenzura ibidukikije byogajuru, bituma ibintu bigenda neza kubakozi n'ibikoresho.
Mu nganda zikoreshwa mu nganda, ibyuma byerekana ingufu za firime zikoreshwa mugucunga neza inzira, kugenzura imikorere myiza no gukora neza. Sisitemu ya robo yishingikiriza kuri ibyo byuma byerekana ibitekerezo byubaka no kumva igitutu, byongera imikorere nubushobozi bwabo. Sisitemu y’umutekano mu nganda kandi ikoresha ibyuma byerekana ingufu za firime kugirango ibone kandi isubize impinduka z’umuvuduko, gukumira impanuka no kurinda umutekano w’abakozi.
Ibibazo Bikunze Kubazwa
Ni izihe nyungu nyamukuru za sensororo ya firime yoroheje?
Ibyuma byerekana imbaraga za firime bitanga sensibilité yo hejuru, miniaturizasiya, hamwe no kwizerwa byongerewe imbaraga, bigatuma biba byiza mubikorwa bitandukanye. Ibyiyumvo byabo bihanitse bibafasha kumenya impinduka zumunota, igishushanyo mbonera cya miniaturize ituma biberanye nibisabwa n'umwanya muto, kandi byongerewe ubwizerwe bituma ibikorwa byigihe kirekire bihamye mubidukikije bikaze.
Nigute utumenyetso twa firime yoroheje itandukanye na sensor gakondo?
Ibyuma byerekana amashusho yoroheje birasobanutse neza, biroroshye, kandi muri rusange biramba kuruta ibyumviro gakondo. Zitanga imikorere myiza mugusaba porogaramu, zirashoboye gukora murwego rwagutse rwubushyuhe nigitutu, kandi zifite ibyiyumvo byinshi kandi byihuta. Ibiranga bituma firime yoroheje yerekana ibintu byiza cyane mubisabwa byinshi.
Nibihe bikoresho bikunze gukoreshwa mubyuma byerekana amashusho yoroheje?
Ibikoresho bisanzwe birimo ibyuma nka zahabu na platine, semiconductor nka silicon, nibikoresho bigezweho nka graphene. Zahabu na platine bikoreshwa cyane muburyo bwiza cyane bwo kurwanya no kwangirika muri sensor electrode. Silicon ikoreshwa cyane muri firime ya semiconductor yoroheje bitewe nuburyo bwiza bwa mashini hamwe nibiranga ibikoresho bya elegitoroniki, mugihe graphene ifatwa nkuguhitamo kwiza kubikoresho bya sensor bizaza bitewe nubushobozi bukomeye bwamashanyarazi nimbaraga za mashini.
Ni izihe nganda zungukirwa cyane na sensor ya firime yoroheje?
Ibinyabiziga, ubuvuzi, icyogajuru, ibikoresho bya elegitoroniki, n’inganda zikoresha inganda byunguka cyane ibyuma byerekana ingufu za firime. Mu nganda z’imodoka, ibyo byuma bikoreshwa mugukurikirana amapine no gucunga moteri; murwego rwubuvuzi, zikoreshwa mugukurikirana umuvuduko wamaraso hamwe na sensor ziterwa; murwego rwindege, zikoreshwa mugukurikirana umuvuduko wa cabine no gukurikirana ubuzima bwubatswe; mubikoresho bya elegitoroniki, byongera uburambe bwabakoresha ibikoresho byubwenge; no mu nganda zikoresha inganda, zikoreshwa mugucunga inzira na robo.
Ni ubuhe buryo bwo gukora bukoreshwa mu byuma byerekana amashusho yoroheje?
Ubuhanga busanzwe burimo gusohora, gushira imyuka ya chimique (CVD), kubika imyuka yumubiri (PVD), hamwe no kubika atome (ALD). Ubu buhanga bushobora kugenzura neza ubunini, uburinganire, hamwe nibigize firime yoroheje, byemeza imikorere ya sensor kandi yizewe. Gusohora ni uburyo bukoreshwa cyane muburyo bwo kubika imyuka yo gukora ibyuma byoroheje; Ubuhanga bwa CVD na PVD bukoreshwa mububiko bwa semiconductor hamwe nibikoresho byo kubika; ALD irashobora kugenzura ubunini bwa firime yoroheje kurwego rwa atome, ibereye gutegura firime ultra-thin.
Reba:
1.Ohring, M. (2001). "Ibikoresho Ubumenyi bwa Filime Ntoya." Itangazamakuru ryigisha.
2.Seshan, K. (2001). "Igitabo gikubiyemo uburyo bworoshye bwo kohereza filime." William Andika
Igihe cyo kohereza: Jun-28-2024